Semiconductor devices, physics and technology /
S.M. Sze, M.K. Lee.
- 3rd ed.
- Hoboken, N.J. : Wiley, 2012.
- ix, 578 p. : ill. ; 27 cm.
Includes bibliographical references and index.
Energy bands and carrier concentration -- Carrier transport phenomena -- p-n junction -- Bipolar devices -- Unipolar devices -- Microwave devices -- Photonic devices -- Crystal growth and epitaxy -- Oxidation and film d-- Diffusion and ion implantation -- Lithography and etching -- Integrated devices.
"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--