Sze, S. M., 1936-

Semiconductor devices, physics and technology / S.M. Sze, M.K. Lee. - 3rd ed. - Hoboken, N.J. : Wiley, 2012. - ix, 578 p. : ill. ; 27 cm.

Includes bibliographical references and index.

Energy bands and carrier concentration -- Carrier transport phenomena -- p-n junction -- Bipolar devices -- Unipolar devices -- Microwave devices -- Photonic devices -- Crystal growth and epitaxy -- Oxidation and film d-- Diffusion and ion implantation -- Lithography and etching -- Integrated devices.

"Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices"--

9780470537947 (hardback)

2011014262


Semiconductors.
TECHNOLOGY & ENGINEERING / Electronics / Semiconductors

TK7871.85 / .S9883 2012

621.3815/2